中文摘要：

利用四参量模型系统研究了由超磁致伸缩（GMS）薄膜材料制备的多层悬臂梁的弯曲问题，其中包括GMS/NMS（非磁衬底）、GMS/GMS、GMS/NMS，GMS等悬臂梁体系．针对此3类悬臂梁研究了它们的弯曲挠度等弯曲特性与构成悬臂梁的各种参数的关系，为进一步设计和优化新型悬臂梁体系给出了一些建议性结论．计算结果表明，GMS/GMS双层悬臂梁，其挠度最大值总是大于具有相同几何结构的其它悬臂梁体系。当在悬臂梁系统中需要使用非磁衬底时，较软而且较薄的衬底有益于得到更大的弯曲挠度，相比之下，两层薄膜较硬，因此薄膜不宜过厚．两层磁致伸缩材料的最优厚度比主要由两层材料的弹性模量比决定，即较软的薄膜需有较大的厚度。由于弯曲后悬臂梁自由端位移向下．因此较硬的磁致伸缩薄膜2（沉积在衬底下表面上的薄膜）有益于增加GMS/NMS/GMS3层悬臂梁的挠度．

英文摘要：

The bending problem of a multilayered cantilever built up of giant magnetostricitve material （GMS） is studied systematically by using the four-parameter model, including systems of GMS/NMS （non-magnetic substrate）, GMS/GMS, GMS/NMS/GMS cantilever. The relationship between the bending characteristics such as bending deflection and the material parameters of the cantilever components are discussed for these three types of cantilever system, and some proposals for further design and optimization of new type of cantilever system are presented. The results indicate that the maximum deflection of the GMS/GMS bilayer cantilever is always greater than other types of cantilever with the same geometry. When the non-magnetic substrate is needed in the cantilever system, the softer and thinner substrate is advantageous for greater deflection. In comparison, two magnetostricitive layers are relatively hard; therefore the films should not be too thick. The optimal thickness ratio of the magnetostricitive films is almost determined by the ratio of elastic modulus, therefore the softer film should be thicker. Since the free end of the cantilever is deflected downwards, harder magnetostricitve film 2 （film deposited on the lower surface of the substrate） is favorable to increase the deflection of GMS/NMS/GMS trilayer cantilever.