采用新的二次阳极氧化工艺,制备了多孔纳米阳极氧化铝(anodized Al2O3,AAO)膜。对铝在草酸溶液中的二次阳极氧化过程进行了研究。利用扫描电镜、原子力显微镜、透射电镜等对其形貌进行了表征和分析。结果表明:用高纯铝所制备的纳米AAO膜孔大小一致,有序性强;膜的孔径随扩孔时间的增加而增大,随草酸浓度的增加而减少。进一步延长扩孔时间至1.5h,其孔径生长规律仍符合AAO膜孔径可控性动力学模型方程,使原模型的扩孔时间范围由1.0h拓展到1.5h。AAO膜的最佳制备工艺为:采用0.3mol/L草酸溶液,电压为40V,在40℃氧化9h和扩孔1h。在最佳制备工艺条件下,制备的AAO膜厚为112.7μm,孔径为70nm左右。
Nanocrystalline anodized Al2O3(AAO) porous film was prepared by a new two times anodic oxidation process.The anodizing process of aluminum in oxalic acid solution was investigated.The morphology of the film was characterized and analyzed by scanning electron microscopy,atomic force microscopy and transmission electron microscopy.The results show that the pores of the AAO film prepared using high pure aluminum template possesses a homogenous and ordered structure.The aperture in the film increases with the i...