中文摘要：

介绍了一种微机电系统（Micro—electro—mechanicalsystem，MEMS）磁场传感器微弱信号处理电路的设计，该处理电路是MEMS磁场传感器的重要组成部分，该电路由放大电路和滤波电路构成。对设计的处理电路进行模拟分析和实验测试，处理电路性能良好。外接MEMS磁场传感器后对传感器性能进行测试，传感器的电流一电压特性以及磁场一电压特性符合最初的设计要求，灵敏度可以达到14mV／mT。实验表明该电路对输出信号进行了放大，并有效地抑制了噪声，且有良好的灵敏度。

英文摘要：

A design of a micro-electro-mechanical system（MEMS） weak signal processing circuit of mag- netic field sensor is described. The processing circuit is an important part of the magnetic field sensor, including an amplifier circuit and a filter circuit. The performance is good in line with the original design requirements through circuit analysis and experimental testing. The current-voltage characteristics and the magnetic field-voltage characteristics of the sensor are verified by experiment with the sensitivity of 14 mV/mT. The experiments show that the signal is effectively amplified, the noise is suppressed and the circuit has good sensitivity.