中文摘要：

研究了一种基于偏振光的集成式单频激光干涉仪。利用偏振光学变换方法,实现了干涉仪的光学4细分结构,提高了测量灵敏度;构建4路正交探测结构,实现了干涉仪的无源偏振调制,扩大了干涉仪测量范围;采用光路集成化的设计方法,实现了一体化干涉仪光路集成。对激光干涉仪进行振动测量实验研究,结果表明,静态位移测量误差小于±0.3 nm,振动测量的分辨率达10 pm/Hz^1/2;上述集成单频激光干涉仪具有测量精度高、稳定性好、动态范围宽、受环境影响小等优点,可被广泛用于纳米测量的各个领域。

英文摘要：

An integrated single-frequency laser interferometer is researched based on polarized light theory.A four-subdivision configuration of the interferometer is achieved by using method of polarization states conversion which can improve the precision of the system.A four-orthogonal detection system is built up and the passive polarization modulation is accomplished which can expand the range of measurement.The integration of the interferometer is achieved by integration optical path.The vibration measurement experiments of the laser interferometer are carried out under laboratory condition.The error of the static displacement measurement is less than 0.3 nm,and the resolution of the vibration measurement reached is up to 10 pm/Hz^1/2.The results show that the integrated interferometer has advantages of high accuracy,good stability,large measurement range and resistance to environment effect.Therefore,the integrated interferometer can be widely used in various fields of nano measurement.