中文摘要：

在碲锌镉单晶体生长系统中，为了探讨碲锌镉晶体生长规律，要求坩埚在炉膛内有梯形波、三角波、方波、正弦波等多种旋转方式；为此，提出了利用交流伺服电机、双AT89S51单片机及D／A转换器等部件设计控制系统的想法；通过硬件设计，优化算法，软件编程实现了坩埚的多波形旋转控制；经过反复调试伺服控制器的PID3个参数的数值，最后找到了实现无差、无延时跟踪的最佳PID控制参数，满足了设计要求。将它安装在晶体生长炉上，经过投料、试生产，长出了合格的碲锌镉单晶体。

英文摘要：

In cadmium zinc telluride single crystal growth system, in order to investigate the growth law of cadmium zinc telluride single crystal, crucible need to have multi rotating method of the trapezoidal wave, triangle wave, square wave, and sine wave etc. Therefore, the idea of design control system is put forward with AC servo motor, 2 AT89S51 and D/A converter etc. By the hardware design and the soft ware programming, realize the crucible rotating control of multi waveform. After repeated debugging proportional, integral and differential time constant size of servo controller, finally found optimal proportion, integral and differential control parameters of without difference and delay tracking, meet the design requirements. Install it to crystal growth furnace, grew out qualified cadmium zinc telluride single crystal through debug, loading producing.