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Dynamic modeling and control of a novel XY positioning stage for semiconductor packaging
  • ISSN号：0142-3312
  • 期刊名称：Transactions of the Institute of Measurement and C
  • 时间：2015
  • 页码：177-189
  • 相关项目：音圈电机直驱的柔性解耦定位系统动力学特性与控制方法
作者： Zhao X Y|Tian Y L|Zhang D W|Liang C M|
同期刊论文项目
音圈电机直驱的柔性解耦定位系统动力学特性与控制方法
期刊论文 17 会议论文 1 专利 2
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