中文摘要：

使用直流同轴磁控溅射法,在SrTiO3（STO）衬底上成功制备出c取向的La1.85Sr0.15CuO4（LSCO）超导薄膜.通过电输运测量系统和X射线衍射仪研究了薄膜厚度对LSCO（x=0.15）薄膜电学性质和晶体结构的影响.实验证明随着膜厚增加,（006）衍射峰的半高宽（Full Width at Half Maximum,FWHM）逐渐减小,薄膜的取向性增强,与此同时,薄膜的超导转变温度TC逐渐提高.

英文摘要：

Highly c-oriented La1.85 Sr0.15 CuO4 （LSCO） films were successfully deposited on SrTiO3 （STO） substrates by on-axis magnetron sputtering. By using the standard four-probe technique and X-ray diffraction （XRD）, we investigated the influence of film thickness on the structure and superconductivity of LSCO（ x = 0. 15） films. The experiment results show that the full-width at half maximum （FWHM） of the （006） rocking curve decreases with increasing film thickness, which indicates that the crystal qualities of films are improved. Meanwhile, the superconducting transition temperature is higher for the thicker films.