中文摘要：

如何实现高精度的测量是现代制造业及微电子技术领域的热点问题之一.基于微纳米测头的三坐标测量机是当前实现高精度测量的重要手段.随着测量尺寸的减小,常用的纳米/微纳尺度的测头与待测表面之间形成静态接触,其表面相互作用成为了影响其测量精度和可靠性的关键因素之一.本文基于一种触发式振动测头,研究了其动力学模型,并通过对测头纳米尺度表面相互作用的理论分析及数值模拟,确立了测头振动参数与表面相互作用之间的关联.实验研究表明,参数优化后的谐振微纳测头能有效抑制表面作用带来的干扰,提高测量精度.

英文摘要：

The high precision measurement has been a focus in the field of manufacturing and microelectronics in this year.The micro/nano probe for coordinate measuring machine（CMM） acts as a key characteristic because it can measure the high-aspect-ratio components with high precision. Various micro/nano-CMM probes with different principles and different structures have been developed in the last decade. However, most of these studies focused on the sensing principle and measurement methods. There is little research on the behavior of the surface interaction between the probe tip and the workpiece. And the measurement accuracy and reliability of the current probe, especially those of the low stiffness probe, are limited by interaction forces including capillary force, van der Waals force, electrostatic force and Casimir force. Therefore, it becomes a challenge to reduce the effect of the surface interaction forces for the Micro/nano CMM probe. A new trigger probe based on the vibrating principle is analyzed and an optimal method for the appropriate vibrating parameters is presented in this paper.The structure and principle of the probe are briefly described in the first part. In this system, a tungsten stylus with a tip-ball is fixed to the floating plate, which is supported by four L-shape high-elasticity leaf springs. The fiber Bargg grating（FBG） sensors are used in the probe for micro-CMM due to their superiority in t of small size, high sensitivity,large linear measuring range, immunity to electromagnetic interference, and low cost. One end of FBG is attached to a floating plate, and the other end to a retention plate which is connected with the piezoelectric ceramic actuator（PZT）.The probe is driven by the PZT vibrating. Assuming that the driving forces can offset the surface interaction forces,then the probe can be described as a forced vibration model of the spring oscillator. Therefore, the equivalent model of the probe is set up.In the second part, a relationship between the vibration parameters of the