X射线能量色散谱(EDS)分析方法在材料领域得到了广泛的应用。将空间差分方法应用到EDS分析中,能够突破电子束斑的限制,大大扩展其分析材料微小区域组分的能力。本文以钛酸锶基陶瓷材料中晶界纳米颗粒和晶界偏析为例,简要介绍了与EDS分析相关的空间差分方法,并进行了进一步的分析和讨论。
The application of X-ray energy dispersive spectroscopy (EDS) is widespread in materials research. By employing the spatial difference method in EDS analysis, it can overcome the limit of electron beam size to achieve the composition of nano-structure embedded within ceramic micmstructures. This paper briefly introduced the EDS analysis involving spatial difference technique. The application of spatial difference method in EDS was exemplified and further discussed by studying the grain boundary structures in SrTiO3 based ceramics.