中文摘要：

电容性传感器存在难以集成、无法满足高精度测量等问题,文中提出了一种利用SiO_2感湿特性的SPR模型检测湿度的新方法,设计传感器能够弥补电容性湿度传感器的不足,通过SPR对介质折射率变化敏感特性,实现湿度传感。检测结果表明：发出波长为630 nm的P偏振光入射时,传感器的灵敏度高达0.026/%,这一结果对于发展新型微纳传感器提出了新的设想。研究结果为制备高灵敏度可集成湿度传感器提供了理论基础和应用数据。

英文摘要：

Capacitive sensor is difficult to integrate,unable to meet the high precision measurement.This paper puts forward a SPR model humidity detection method using SiO_2 moisture properties.The design of the sensor can make up for the inadequacy of capacitive humidity sensor,through the SPR sensitive properties on medium refractive index,the humidity sensing was realized.The test results show that wavelength of 630 nm P polarized incident,the sensitivity of the sensor is as high as 0.026/%.The results for developing new micro-nano sensors can improve the new consideration.The results for the preparation of high sensitivity can be integrated humidity sensor provide theoretical basis and application data.