中文摘要：

针对无结合剂碳化钨材料,进行非球面模具的法向磨削试验研究.分析法向磨削非球面时的砂轮对刀误差对磨削精度的影响,研究无结合剂碳化钨非球面模具的磨削表面形貌特征和最终表面质量,优化误差补偿工艺,并利用聚焦离子束对磨削后的非球面亚表层损伤进行成像分析.研究结果表明利用推导的砂轮对刀误差方程,可以在磨削加工前对砂轮的初始位置进行精确调整,提高磨削加工精度.磨削后无结合剂碳化钨非球面模具不同区域的表面质量不同,距非球面中心越近,磨削质量越好,距中心越远,磨削质量越差.经过3次误差补偿磨削加工后,最终的无结合剂碳化钨非球面模具的面形精度误差均小于0.3 μm（PV值）,表面粗糙度平均值小于8nm（Ra值）,亚表层没有明显的裂纹产生.

英文摘要：

The ultra-precision wheel normal grinding of binderless tungsten carbide aspheric mold is researched.The influence of grinding wheel initial position error on grinding accuracy is analyzed.The ground surface morphology and quality of binderless tungsten carbide aspheric are presented.And then,the grinding error compensation is optimized and the subsurface damage of mold is studied by focus ion beam.The results show that the grinding wheel initial position error model is useful to enhance the grinding wheel initial position accuracy.The morphology and quality of binderless tungsten carbide aspheric surface are inhomogeneous.The surface quality of aspheric center is better than that of aspheric edge round.Finally,after 3 times error compensation,there binderless tungsten carbide aspheric molds with 0.3 μm （PV） form accuracy and 8 nm （Ra） surface roughness are obtained,and no crack is found in subsurface of these molds.