中文摘要：

目的为了解决传统陶瓷阻隔薄膜的裂纹问题。方法采用射频磁控共溅射的方法在基底PP表面制备Ti Nx/CFy薄膜,并通过改变输入PTFE与Ti靶的射频功率比大小控制Ti Nx相与CFy相的体积分数,利用RBS与FTIR表征复合薄膜化学元素组成与结构,并根据各原子数分数结果计算出复合薄膜中Ti Nx的体积分数,建立该值与薄膜的透氧率、透湿率之间的关系。结果 Ti Nx相与CFy相的体积分数及薄膜的细部结构直接影响薄膜的透氧率与透湿率,同时也影响薄膜的柔韧性能。结论 Ti Nx相的体积分数为0.28时,复合薄膜的柔韧性能及阻隔性能最好。

英文摘要：

In order to solve the crack problem of the traditional ceramic barrier films, RF magnetron co-sputtering method was used for the preparation of TiNJCF, films on PP substrate. Relative volume ratio of the hard phase TiNx and soft phase CF,. was controlled by varying the input RF power ratio between PTFE （Polytetrafluoroe thylene） target and the Ti target. Chemical composition of the composite film was explored using RBS and FTIR, based on which the TiNx volume content in the composite films was calculated. Also, the relationship between the TiNx volume content and OTR and WVTR was established. The results showed that the detailed structure, the volume content of TiN, phase and CFy phase had direct effects on OTR and WVTR values, and also on the flexibility performance of the films. The flexibility and barrier properties of the composite film was the best when the TiNx phase volume content was 0.28.