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A decoupled 2-DOF flexure-based micropositioning stage with large travel ranges
  • ISSN号：0263-5747
  • 期刊名称：Robotica
  • 时间：2013.11.11
  • 页码：1-18
  • 相关项目：具有压印力解耦功能的新型纳米压印平行对准系统关键技术研究
作者： Xiantao Sun|Weihai Chen|Rui Zhou|Wenjie Chen|Jianbin Zhang|
同期刊论文项目
具有压印力解耦功能的新型纳米压印平行对准系统关键技术研究
期刊论文 9 会议论文 16
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