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XPS study on the selective wet etching mechanism of GeSbTe phase change thin films with tetramethyla
  • 期刊名称：Proc.SPIE
  • 时间：2013.1.1
  • 页码：87820N-
  • 相关项目：相变信息存储材料的快速相变机制和策略研究
作者： Changmeng Deng|Yongyou Geng|Yiqun Wu|
同期刊论文项目
相变信息存储材料的快速相变机制和策略研究
期刊论文 37 会议论文 4 著作 1
同项目期刊论文
纳秒单脉冲激光诱导AgInSbTe薄膜的相变特性
近红外波段锑基铋掺杂薄膜厚度对光学常数与光学带隙的影响
Super-resolution readout property of bismuth-doped antimony-based thin film as a functional mask for
AgInSbTe相变薄膜的热刻蚀腐蚀特性
Selective etching characteristics of the AgInSbTe phase-change film in laser thermal lithography
Comparison of optical transients during the picosecond laser pulse-induced crystallization of GeSbTe
Adhesion effect of interface layers on pattern fabrication with GeSbTe as laser thermal lithography
Nonlinear two-photon absorption properties induced by femtosecond laser with the films of two novel
VO2-like thermo-optical switching effect in one-dimensional nonlinear defective photonic crystals
Influence of pulse fluences on the phase change processes of AgInSbTe thin films under nanosecond la
Rapid phase change induced by double picosecond laser pulses and the dynamics of acoustic phonons
Polarization readout analysis for multilevel phase change recording by crystallization degree modula
Influence of film thickness on optical constants of antimony-based bismuth-doped super-resolution ma
Real-time measurement of electrical and optical transients of as-deposited amorphous AgInSbTe thin f
Polarity-dependent reversible resistance switching in as-deposited AgInSbTe phase change film
Description and reconstruction of one-dimensional photonic crystal by digital signal processing
Sb_(80)Bi_(20)光学非线性纳米薄膜的超分辨效应
铜铝合金溅射薄膜的飞秒激光诱导击穿光谱分析
Modulation of Kerr nonlinearity on spectral characteristics for one-dimensional nonlinear defective
Different crystallization processes of as-deposited amorphous Ge2Sb2Te5 films on nano- and picosecon
激光光刻技术的研究与发展
New calix[4]arene derivatives as maskless and development-free laser thermal lithography materials f
Controllable crystallization of Ge2Sb2Te5 phase-change memory thin films driven by multiple femtosec
Phase-selective fluorescence of doped Ge2Sb2Te5 phase-change memory thin films
Enhanced temperature sensing based on sub-threshold nonlinear spectra of one-dimensional photonic cr
FDTD analysis of silver-nanoparticle-embedded phase change recording pits
Locally formation of Ag nanoparticles in chalcogenide phase change thin films induced by nanosecond
Enhancement Effect of Patterning Resolution Induced by an Aluminum Thermal Conduction Layer with AgI
锑铋合金薄膜的光学常数
Sb80Bi20光学非线性纳米薄膜的超分辨效应
Progress of super-resolution near-field structure and application in optical data storage
Polarization readout analysis for multilevel phase change recording by crystallization degree modulation