中文摘要：

用射频溅射法制备了（Fe88Zr7B5）0.96Cu0.04非晶软磁合金薄膜.研究了不同退火条件对其巨磁阻抗（GMI）效应的影响.该样品在自然退火和电流退火热处理后,纵向GMI比下降,并随退火电流的增加而增加,在电流为800mA时达到最大值17%,磁场灵敏度相对于未退火样品的4%（kA/m）^-1有所提高,达到7%（kA/m）^-1.（Fe88Zr7B5）0.96Cu0.04薄膜经不同温度下纵向磁场退火处理后,样品的纵向和横向GMI比均有所提高,在250℃获得最大的GMI比,13MHz时,最大纵向磁阻抗比达到17.5%,表现为单峰;横向磁阻抗比曲线变为双峰结构,在±0.4kA/m的磁场下,出现峰值为17.8%。

英文摘要：

Influence of different annealing process on the giant magneto-impedance（GMI） effect in soft magnetic alloy films of（Fe88Zr7B5）0.96Cu0.04,which were prepared by radio frequency（RF） sputtering,was studied.It is obtained that both natural and current annealing can reduce the longitudinal GMI ratio.And the longitudinal GMI ratio of the annealed films increases with the increase of annealing current,and reaches a maximum value of 17% at 800mA,while the sensitivity increase to 7%（kA/m）^-1 at such annealing current（800mA）.In addition,influence of the magnetic field annealing on GMI effect is discussed.It is found that both the longitudinal and transverse GMI ratios of the films after magnetic field annealed increase at different temperatures.There exists a critical temperature（250℃）,at which the longitudinal GMI ration presents a single-peak with a value of 17.5%,while the transverse one presents a double-peak with a value of 17.8% at ±0.4kA/m.