中文摘要：

微夹钳在夹持过程中需要外加微力传感器才能组成闭环控制系统，本文介绍一种功能集成的压电式微夹钳，采用光刻技术在夹钳表面压电陶瓷片的电极上分割出传感区和执行区，称为空分复用。通过传感区交流信号幅度变化与夹持力之间的比例关系来实现夹钳执行过程中力的自感知。利用LabVIEW的虚拟仪器技术，实现整个测量控制系统。实验证明，不需任何外加传感元件，就能够检测出夹钳的输出力。

英文摘要：

Microgripper requires extra micro-force sensors to form closed loop control system. This paper introduced a kind of piezoelectric microgripper of functional integration, where the electrode on piezoceramics which was bonded to the surface of micro-gripper was divided into two parts using lithography, one for actuation, another for sensing. It was named the space - sharing method. Through the proportional relation between AC amplitude variety obtained by sensor electrode and grasping force, the grasping force serf-sensing was realized. Measurement and control system was accomplished by making use of virtual instrument technique on the platform of LabVIEW. Experiment results prove the microgripper can sense its own actuating effect without any extra sensor element.