中文摘要：

针对飞秒激光微纳加工技术中激光与加工样品相对运动的控制、聚焦光斑能量的控制中存在的问题，提出一种基于硅基液晶空间光调制器动态加载计算全息图同时控制焦点位置和能量的新型加工方法。该方法通过加载叠加闪耀光栅的全息图，控制单点运动来扫描加工二维结构，无需平台移动。进一步控制全息图的挖空区域，可以调制入射光斑的能量，进而控制被加工点阵的形貌。利用这一加工效应，成功实现各种可控环状结构的加工，并在光学显微镜下测试达到相应效果，证明这种加工方法在飞秒激光微纳加工领域具有可行性。

英文摘要：

To address the problems of relative movement control of laser and samples and the focus energy control in the femtosecond laser micro-nanofabrication technologies, a new method, which is based on dynamically loading computer-generated holograms through a liquid crystM-on-sihcon spatial light modulator, is proposed to simultaneously control the position and energy of the focal spot. By loading superposed blazed grating holograms, two-dimensional structure fabrication can be achieved by single point scanning without platform movement. Further, by controlling the active zone in the hologram, the incident beam energy can be modulated, and thus the lattice morphology can be controlled. Taking advantages of this method, we have fabricated ring structures successfully, and got the corresponding effect under an optical microscope. This proves that the method is feasible in the field of femtosecond laser micro-nanofabrication.