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CHF3 Dual-Frequency Capacitively Coupled Plasma by Optical Emission Spectroscopy
  • 期刊名称：CHIN. PHYS. LETT.
  • 时间：0
  • 页码：2942-2945
  • 语言：英文
  • 相关项目：低气压多频等离子体与材料表面相互作用
作者： YUAN Jing|XING Zhen-Yu|HUANG Xiao-Jiang|XU Yi-Jun|NING Zhao-Yuan|YE Chao|
同期刊论文项目
低气压多频等离子体与材料表面相互作用
期刊论文 80 会议论文 8
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