欢迎您！东篱公司
退出
-
申报数据库
-
立项数据库
-
成果数据库
-
项目获奖数据库
中文摘要：
介绍了一种可用于软光刻操作的恒温实验台的设计与实现。在一个密闭的小型箱体中集成了温度与压力控制、照明及紫外光照、操作手套等组件，可以实现无尘、恒温、压力可控、紫外光照等多种功能。在该恒温实验台中，利用聚二甲基硅氧烷进行微传递模塑实验研究，考察了温度、压力等对聚二甲基硅氧烷成模特性的影响。同时，还利用聚二甲基硅氧烷与聚亚胺脂的两次复制完成了硅微芯片结构向玻璃基底的转移。研究结果表明：这一新的实验研究平台可以实现恒温、无尘操作、一定的真空度以及紫外照射，满足普通实验室进行微传递模塑等软光刻操作的要求。
英文摘要：
A constant temperature laboratory casework is designed for soft-lithography manipulation. Several components such as temperature and pressure control modules, general and ultraviolet illuminating modules, and manipulation gloves are integrated within a small airtight box to realize multiple functions. PDMS based microtransfer modeling method has been studied on this laboratory casework, and the influence of temperature, pressure on the modeling characteristics is also explored. Meanwhile, micro-structures on silicon microchip is transferred to glass substrate by using twice replication of PDMS and PU. Experimental results validate that this new laboratory casework can achieve constant temperature, cleaning manipulation, certain vacuum, and ultraviolet illumination. It is suitable for the soft-lithography manipulation in common laboratory.
同期刊论文项目
同项目期刊论文
期刊信息
位置：