中文摘要：

阐述了半导体光电位置敏感器探测器（PSD）的特性及定位理论，在此基础上，分析了双面PSD的空间分辨率与引起畸变的原因，建立了双面PSD的模型；采用敏感前置放大器的信号波形，对双面PSD内的非线性与模拟的结果进行分析与对比，提出了利用电荷灵敏前置放大器改善PSD的内在畸变的方法。最后给出了关于双面PSD的几个重要结论。

英文摘要：

The characteristic and positioning theory of the semiconductor optoelectronic position sensitive detec- tor（PSD） are presented in this paper. The spatial non linearity and distortions of duo-lateral PSD are investigated and the duo-lateral PSD model has been established. Comparing the non-linearity of duo-lateral PSD with the model results by using the sensitive preamplifier signal waveform, a new method is proposed which is used the charge-sensi- tive preamplifier to improve the inner distortion of PSD. In the end of the paper,several important conclusions about duo-lateral PSD are proposed.