中文摘要：

提出了一种新型的微光学太赫兹辐射探测方法，以双材料微悬臂梁结构热探测方法为基础，通过多重反射光杠杆系统测量微结构的纵向微位移，从而实现太赫兹辐射量的测量。多重反射光杠杆探测方法微位移理论分辨率小于1nm。搭建了微位移测量系统，实验结果表明，测试系统理论分辨率小于4nm，实际分辨率优于10nm。给出了基于该方法的太赫兹探测器设计方案和参数。因其具有良好的抗空气扰动和光束串扰能力，可以在常温下工作，适用于非制冷、实时、低成本、微小型化的太赫兹探测器和阵列式成像设备。

英文摘要：

A new micro-optical method for Terahertz radiation measurement was presented, which was based on optical lever and thermal radiation detection. A bi-material micro cantilever was used to generate micro-deformation caused by Terahertz radiant thermal effect, and the micro-deformation was measured by a multiple reflection optical lever composed of a pair of plane mirrors. Then radiation power of Terahertz waves were obtained. Micro-displacement theoretical resolution of this multiple reflection optical lever method could be less than 1 nm and a measuring system was set up to verify it. Experiments show that theoretical resolution of this test system is less than 4 nm and its actual resolution was less than 10 nm. Designs and parameters of a Terahertz detector based on this method were given. This approach had many advantages such as anti-air turbulence, anti-beam cross-talk, and working at room temperature. So this new method was suitable for realizing miniaturized Terahertz detectors with the features of uncooled, real-time, low-cost, and it was also appropriate for manufacturing array detectors for imaging detection.