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Co/a-GeSi/Ti/Si多层薄膜固相反应外延生长CoSi2薄膜
  • 期刊名称：固体电子学研究与进展,
  • 时间：0
  • 页码：23(2), 149-154 (2003).
  • 语言：中文
  • 相关项目：多层薄膜固相反应与Co-Ni系硅化物薄膜外延及应用研究
作者： 徐蓓蕾|屈新萍|韩永召等|
同期刊论文项目
多层薄膜固相反应与Co-Ni系硅化物薄膜外延及应用研究
期刊论文 15 会议论文 3
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