中文摘要：

采用脉冲偏压电弧离子镀技术在单晶硅基片及石英玻璃上制备了一系列均匀透明的Cr-O薄膜.用场发射扫描电子显微镜、X射线衍射仪、X射线光电子谱、纳米压痕仪、紫外可见光分光光度计等方法对薄膜的表面形貌、膜厚、相结构、成分、元素的化学价态、硬度和光学性能等进行表征，主要研究了偏压幅值对薄膜结构和性能的影响.结果表明，施加偏压可使薄膜的沉积质量明显提高，其相结构由非晶态转变为晶体态，并随着偏压幅值的增加，由Cr2O3相向CrO相转变；薄膜的硬度先增大后减小，当偏压为？300 V时，硬度达到最大值24.4 GPa；薄膜具有良好的透光率，最高可达72%；当偏压为？200 V时，薄膜的最大光学帯隙为1.88 eV。

英文摘要：

A series of uniform and transparent Cr-O films were synthesized on the silicon and quartz glass substrates at different bias voltages by pulsed bias arc ion plating. Effects of bias voltage on surface morphology, phase structure, composition, chemical valence states, hardness and optical property of the films were investigated by field emission scanning electron microscopy, grazing incident X-ray diffraction, X-ray photoelectron spectroscopy, nanoindentation and ultraviolet-visible spectrophotometer, respectively. Results indicate that the bias voltage can improve the quality of the films significantly and plays an important role in the film properties. Macroparticles and holes are observed on the surface of the films if without application of bias voltage, while the films prepared with bias voltage are uniform and smooth. The crystalline phase of the film is of amorphous structure if without bias voltage. While the bias voltage applies and increases from？100 V to？500 V, the Cr2O3 phase appears and changes into CrO phase. The crystal plane （104）, （116） of the Cr2O3 phase and （200） of the Cr phase are observed in the film at the bias voltage of？100 V. When the bias voltage is above？200 V, the crystal planes （311） and （400） of the CrO phase can be observed. In order to further obtain the structure information, a detailed XPS study is performed. Chromium in the films shows different valence states, namely metallic Cr, Cr2＋, Cr3＋and Cr6＋. Thereby, the main components of the polycrystalline films are Cr2O3 and CrO phases, meanwhile, and the films also contain a small amount of CrO3 and metal Cr phases. The films under different bias voltage show good mechanical properties and the hardness of all the films is above 19 GPa. With the increase of bias voltage the hardness first increases and then decreases, reaching a maximum value of 24.4 GPa at the bias voltage of？300 V. The films show good optical transmittance and its highest value can be up to 72%. As the bias voltage rises, it is