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Influence of Substrate Temperature on Structural Properties and Deposition Rate of AlN Thin Film Dep
  • ISSN号：0361-5235
  • 期刊名称：Journal of Electronic Materials
  • 时间：2012.7.7
  • 页码：1948-1954
  • 相关项目：集成化射频高Q薄膜体声波谐振器
作者： Jin, Hao|Feng, Bin|Dong, Shurong|Zhou, Changjian|Zhou, Jian|Yang, Yi|Ren, Tianling|Luo, Jikui|Wang, Demiao|
同期刊论文项目
集成化射频高Q薄膜体声波谐振器
期刊论文 38 会议论文 17 专利 17
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