中文摘要：

研究不同线圈参数下电感耦合等离子体的温度及流场分布可以为等离子体炬的设计提供参考。本文首先建立了ICP炬的二维轴对称模型,然后利用商业软件ANSYS FLUENT对纯氩热等离子体流场、温度及电磁场的空间分布进行了计算,并研究了线圈参数的变化对等离子体炬内温度和流场空间分布的影响。研究结果表明：增加线圈匝数、减小线圈间距及线圈内半径均能显著增加等离子体温度,并对轴向速度及等离子体炬内的流场分布产生较大的影响;改变线圈内半径也能使炬内的温度及流场发生变化,但对温度幅值的影响却非常小;因此可以通过改变相应的线圈参数来控制炬内的温度和流场分布,从而满足特定材料处理工艺的需要。

英文摘要：

The temperature and flow fields in inductively coupled plasma torch were mathematically modeled,theoretically analyzed and numerically simulated with software ANSYS FLUENT for design optimization. The impact of the coil parameters,including the loop-number,loop-spacing and inner-radius of the coil,on the axial distributions of the temperature,velocity and electromagnetic（ EM） field of the argon plasma was investigated. The simulated results show that the coil parameters strongly affect the temperature,velocity and EM fields. For example,an increase of the loop-number or a reduction of the loop-spacing or a decrease of the inner-radius of the coil significantly increases the hottest temperature and strongly affects the axial velocity and flow fields to varying degrees; and the variations in the inner-radius have some impact on the temperature and flow fields,but little impact on the temperature amplitude.