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Experimental investigation of ion energy distributions in a dual frequency capacitively coupled Ar/C
  • 期刊名称：PHYSICS OF PLASMAS
  • 时间：0
  • 页码：033501-1-033501-8
  • 语言：英文
  • 相关项目：低气压多频等离子体与材料表面相互作用
作者： Zhen-Hua Bi|Ai-Min Zhu|Zhi-Cheng Li|Xiao-Song Li|Da-Lei Chang|You-Nian Wang|Yong Xu|Wen-Qi Lu|
同期刊论文项目
低气压多频等离子体与材料表面相互作用
期刊论文 80 会议论文 8
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