欢迎您！东篱公司
退出
-
申报数据库
-
立项数据库
-
成果数据库
-
项目获奖数据库
中文摘要：
为获得单室沉积高效微晶硅（μc-Si）太阳电池,首先采用甚高频等离子体增强化学气相沉积（VHF-PECVD）技术制备了不同沉积条件下的本征μc-Si薄膜。通过对材料的结构和电学输运特性的研究,借鉴分室沉积的器件质量级μc-Si材料的经验,选取合适的本征层和p种子层处理B污染的技术,在单室中制备出光电转换效率为6.23%（1cm^2）的单结μc-Si电池。
英文摘要：
To obtain high efficiency microcrystalline silicon solar cell in single chamber, a series of intrinsic microcrystalline silicon thin films were prepared by very high frequency plasma enhanced chemical vapor deposition（VHF-PECVD） at different deposition conditions. The structural and electrical properties of these films were researched. Based on the experience of device grade intrinsic microcrystalline silicon used in multi-chamber,through the choice of suitable intrinsic layer and p seeding layer technique, the single junction microcrystalline silicon solar cell with 6.23 % （1 cm^2 ） conversion efficiency has been fab- ricated in single chamber.
同期刊论文项目
同项目期刊论文
Influence of front electrode and back reflector electrode on the performances of microcrystalline si
Study of space voltage distribution between large-area parallel-plate electrodes for very high frequ
Study on the optical and electrical properties of plasma for the deposition of microcrystalline sili
Study of one-dimensional spatial distribution of the plasma luminous radicals during depositing sili
Modeling and experiments of high-pressure VHFSiH4/H-2 discharges for higher microcrystalline silicon
Influence of low rate p/i interface layer on the performance of high growth rate microcrystalline si
期刊信息
位置：