中文摘要：

本文首先利用离子光学模拟软件SIMION7.0,对自制的电子轰击离子源（EI）进行模拟试验,获得离子在EI内的运动参数,包括位置、速度。随后,利用相空间方法,分析EI各参数对其性能的影响,包括各电极电压对聚焦效果以及出射速度分散程度的影响,并最终获得EI各参数对离子源发射度的影响。本文的研究能够指导EI的理论设计,使其参数得到最优化,从而改善EI的性能,以实现EI与质量分析器最佳连接。

英文摘要：

The motion of the individual ion in our prototyped,lab-built electron impact ion source（EI） was simulated with the ion optics simulation software package,SIMION7.0,to analytically determine its position and velocity.The influence of the EI parameters,such as the voltage of A,B,and C electrodes,EI structures,and alignment,on its characteristics,including the focusing and velocity divergence of the emitted ion beam and the emission rate of the EI,was evaluated in phase space.The simulated results show that the EI structure and its operation parameters significantly affect its performance.We suggest that good electron impact ion source can be designed,fabricated,and integrated with the mass analyzer by optimizing the EI parameters.