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The Research on Mechanical Effect Etching Si in Pulsed Laser Micromaching under Water
  • 期刊名称：Applied Surface Science
  • 时间：2011.3.3
  • 页码：3677-3681
  • 相关项目：激光作用固液界面物质的微尺度热力效应研究
作者： L. Yuhong|X. Liangcai|S. Tielin|
同期刊论文项目
激光作用固液界面物质的微尺度热力效应研究
期刊论文 10 会议论文 1 专利 3
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Experimental Study on the Process of Excimer Laser-enhanced Electrochemical Etching of Metal
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248nm与808nm激光电化学刻蚀不同材料的实验研究
A study of the effects laser pulse parameters have on the laser-induced electrochemical etching of s
高能量短脉冲激光作用水分子的动力学模拟
The study of the solution concentration influencing on laser-induced electrochemical etching silicon
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微尺度激光冲击强化的影响因素分析