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中文摘要：
介绍了采用了MgB2薄膜的化学气相沉积（CVD）异位退火和双温区混合物理化学气相沉积（HPCVD）制备技术，并以B膜作为势垒层在多晶的AlzOs基底上制作了三明治结构的MgB2／B／MgB2多层膜．采用扫描电子显微镜（SEM）、X射线衍射（XRD）和标准四线法对制备的MgB2／／3／MgB2多层膜的断面结构、超导薄膜晶体结构及超导特性进行了测量研究．结果表明，制备的MgB2／B／MgB2多层膜结构清晰，底层和顶层超导薄膜显示出良好的超导特性．
英文摘要：
The sandwich-type MgB2/B/MgB2 trilayers were fabricated on polycrystalline A12 03 substrate, which the top and bottom MgB2 layers were grown by chemical vapor deposited（CVD） ex situ and hybrid physics-chemis- try vapour deposited（HPCVD） in a two-zone system, the B barrier were prepared by CVI）. Scanning electron mi- croscopy, X-ray diffraction and four-point probe method were carried out to study cross-sectional structure, super- conducting properties and crystal structure of MgB2/B/MgB2 trilayers. The results addressed the MgB2/B/MgB2 trilayers have a good structural and superconducting properties using the trilayer deposition process.
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