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EXPERIMENTAL STUDY OF SPATIAL NON-UNIFORMITIES IN A DUAL FREQUENCY CAPACITIVELY COUPLED PLASMA
  • 期刊名称：Modern Physics Letters B
  • 时间：0
  • 页码：3409-3417
  • 语言：英文
  • 相关项目：低气压多频等离子体与材料表面相互作用
作者： YONG XU|AIMIN ZHU|JIANPING SHANG|YOUNIAN WANG|GUOLI ZHAO|WENQI LU|
同期刊论文项目
低气压多频等离子体与材料表面相互作用
期刊论文 80 会议论文 8
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