中文摘要：

为测量印刷线路板（PCB）上密集直线的线宽，构建了由CCD摄像机、视频采集卡、照明装置和PC机组成的光机电一体测量系统。该系统首先用矩形框获取包含被测线宽的局部图像，并进行相应的预处理；然后，采用扫描方法荻取被测线宽的两边缘点集，进而采用最小二乘拟合、奇异点去除、再次拟合的方法获取两边缘直线方程；最后，利用去奇异点后的两边缘点集和两边缘直线方程计算得到直线的线宽。仿真和真实线宽测量实验结果表明，该系统具有较高的测量效率和精度，其重复测量精度优于2μm，已被多家PCB生产厂采用。

英文摘要：

To measure the linewidth of the dense measurement system consisting of CCD camera, video lines on the printed circuit board （PCB）, a acquisition card, lighter and computer was developed. First, the local image of the measured line was acquired by a rectangle frame, and was preprocessed properly. Then, the two point set of the measured line fringe was obtained by scanning. By using the least square line fitting, the noise points denosing, and repeated fitting, the two fringe line equations were got. Finally, the width of the measured line was calculated by using two denoising point set and two fringe line equations. Simulation and experimental results show that the system is efficient and precise in measurement. The error bar of the system is lower than 2μm by repeated measurements. The system has been adopted by many PCB manufactures.