中文摘要：

高精度的微定位平台是精密定位技术研究的重要内容之一。采用柔顺机构作为微定位机构及压电陶瓷作为驱动器,设计了一种3自由度精密微定位平台。首先,对设计的微定位平台进行了理论分析,得出了该平台的理论输入与输出关系,同时确定了其行程范围。然后,采用ANSYS有限元方法对该平台在给定输入情况下的变形进行了分析,并对其输出位移进行了仿真。分析结果表明,设计的3自由度微定位平台理论分析结果和仿真分析结果基本吻合。最后,根据分析结果,制作了微定位平台样机。这种高精度的微定位平台在精密定位领域有着广泛的应用前景。

英文摘要：

Mirco-positioning stage with high accuracy plays an important role in precise positioning technology. The 3-DOF precision positioning stage is developed in this paper, where the Mirco-positioning mechanism is designed with the compliant mechanism and the piezoelectric ceramic transducer （PZT） is viewed as the actuator. Firstly, by the theoretical analysis for this mirco-positioning stage, the relationship between input and output is obtained, and the stroke range is determined. Secondly, under the given input condition, the deformation of this stage is analyzed by the ANSYS finite element method, and the output displacement is simulated. The results show that the theoretical analysis is agreed with simulation. Finally, the prototype of the 3-DOF precision mirco-positioning stage is manufactured according to the results. The micro-positioning stage with high accuracy can be used broadly in precise positioning technology.