为了研究热处理工艺参数对V2O5薄膜微观结构与性能的影响,采用改进无机溶胶-凝胶法制备稳定的V2O5溶胶,以石英玻璃为基片,通过浸渍提拉法制得V2O5薄膜,再进行真空热处理。利用X射线衍射谱仪(XRD)、场发射扫描电镜(FEsEM)、UV-Vis分光光度计和UV-Vis-NIR光谱仪对热处理后的V2O5薄膜进行测试。结果表明,热处理工艺参数(时间、温度等)的变化对V2O5薄膜分解的动力学和热力学过程产生影响,从而引起薄膜表面形貌、物相以及光学性能的演变。
The improved sol-gel technique and dip withdrawal method have been employed to produce V2O5 thin film, deposited on quartz glass substrates. And then the samples were heat-treated in the vacuum furnace. The effect of heattreatment on the microstructure and properties of the V2O5thin film was investigated by the XRD, FE-SEM and UV-Vis- NIR spectrophotometer. The results indicate that the surface topography, crystal phase and optical properties systematically change with the evolution of parameters of heat-treated process.