中文摘要：

做的 ZnO 电影由 nanoparticles 装配了的钴被低精力簇横梁免职准备。微观结构，阶段结构和光性质为 nanostructured 电影被调查。结果证明 nanostructured 电影被有是的大约 29.3 nm 的平均直径的球形的 nanoparticles 一致地并且简洁地散布了的 monodisperse 装配。X 光检查衍射(XRD ) 的结果证明那钴做了 ZnO nanostructured 电影被索引到 ZnO，和没有合作阶段结构的 wurtzite 结构，另外的阶段被观察。紫外可见的吸收系列证明这部电影的光乐队差距在做以后被拓宽。

英文摘要：

Cobalt doped ZnO film assembled by the nanoparticles was prepared by low energy cluster beam deposition. The microstructure, phase structure and optical properties were investigated for the nanostructured films. The results show that the nanostructured film was assembled by monodisperse spherical nanoparticles with average diameter of about 29.3 nm which are distributed uniformly and compactly. The results of X-ray diffraction （XRD） show that cobalt doped ZnO nanostructured film is indexed to a wurtzite structure of ZnO, and no Co-phase structure and other phases are observed. The UV-visible absorption spectra show that the optical band-gap of the film is broadened after doping.