中文摘要：

采用等离子体辅助化学气相沉积法在单晶硅表面制备由硬／软亚层交替构成的类金刚石多层膜，通过调整工艺参数获得亚层厚度在25～1000nm之间的DLC多层膜，采用球-盘摩擦磨损试验机探讨了DLC多层膜在真空、氧气及干燥空气下的摩擦磨损行为．结果表明，在不同摩擦环境下，多层结构对DLC多层膜的摩擦系数影响较小，但对其磨损率影响较大．多层结构可以有效抑制DLC膜的磨损，特别是在氧气和干燥空气环境中，DLC多层膜的磨损率明显低于DLC单层膜．特定亚层厚度的DLC多层膜在不同摩擦环境中均具有稳定的耐磨性能，磨损率约在10^-8mm^3／Nm数量级．

英文摘要：

DLC muhilayer films consisting of alternating layers of soft and hard carbon films were deposited on Si wafer by a plasma CVD deposition system. The DLC muhilayer films were modified by changing the sub-layer thickness （from 1000 to 25 nm）. By using a ball-on-disk tribo-tester, the friction and wear properties of the DLC multilayer films were measured in vacuum, O2 and dry-air environments respectively. By compared with single-layer DLC film, the change of the muhilayer structure had little influence on friction coefficient of the muhilayer films. However, the wear rate of the DLC muhilayer films was inhibited effectively by the muhilayer structure in the film. The wear rate of the muhilayer films was lower than that of the single film in reactive （ O2 and dry-air） environments. An environment insensitive DLC muhilayer film with excellent wear resistance, approximately in the level of 10^-8 mm^3/Nm in different environments （dry-air, O2 and vacuum）, was obtained.