中文摘要：

用MOCVD法在蓝宝石衬底上得到了ZnO（0002）膜，并用XRD和SEM进行了表征．结果表明，薄膜中沿[0001]择优取向生长的柱状晶垂直于衬底表面，晶柱之间存在着边界和间隙．x射线中扫描实验结果表明．晶柱之间的取向偏差在3°-30°之间，X射线ω摇摆曲线和谱线宽度分析结果表明，薄膜中的晶柱是由多个晶粒堆叠而成，且晶粒之间的平均取向偏差也在2．6°以上．实验结果表明，ZnO大失配度异质外延膜是c轴[001]取向柱状多晶体，ZnO薄膜的结晶不完整性主要是由其柱状晶结构造成的。

英文摘要：

ZnO（0002） films were grown on sapphire（0006） substrate by metal-organic chemical vapor deposition（ MOCVD ） and were characterized by X ray diffraction （XRD） and scanning electronic microscope （SEM）. SEM and XRD results show that the columnar crystals grew along c-axis and were vertical to the （0006） plane of the substrate. There exist grain boundaries and grain interstitials among the crystals. The Φ scanning curves of the（ 10 - 13 ） plane for ZnO films show that the mis-orientation among columnar crystals ranged from 3° to 30°. The full wide at half maximum（FWHM） of rocking curves of（0002） plane for the ZnO films is above 2.6°. Grain sizes at different thicknesses illustrate that the column is composed of the grains with different sizes. The big mismatch heteroepilayer ZnO films are columnar poly-crystals orienting along c axis.