中文摘要：

空间三平移柔顺并联超精密定位平台支撑结构具有全柔性特性,通过压电陶瓷驱动器驱动。通过对全柔性支链静刚度分析,建立其运动仿真模型。基于柔性变形理论对空间三平移柔顺并联超精密定位系统运动耦合特性进行分析,并采用ANSYS有限元分析软件进行运动特性的仿真研究,仿真结果表明该柔性并联超精密定位平台具有良好的解耦性。

英文摘要：

A newly designed 3-DOF spatial translational compliant parallel ultra precise positioning platform is proposed.The platform is consist of three compliant parallel limbs which is driven by piezoelectric actuators（PZTs） whose strokes are amplified by using the amplification lever mechanism.Strict analyses are subject separately to static stiffness of the amplification lever mechanism,the theoretic models are formed,and the platform parasitic motion is studied analytically.Moreover,its motion properties are verified through the finite element analysis conducted with ANSYS software package.The simulation results reveal that the positioning platform possesses a good decoupled property.