中文摘要：

提出了一种制备扫描近场光学显微镜光纤探针的自动化腐蚀方案.该方案利用静态腐蚀过程中光纤所形成的特殊结构,及动态腐蚀过程中光纤在氢氟酸中的移动所带来的新月形弯液面在光纤表面接触位置的变化，通过合理控制腐蚀时间来制备尖端锐利、大锥角或多锥体角等各种结构的探针.设计方案采用计算机控制整个装置实现了探针制备过程的自动化，保持了腐蚀光纤探针实验条件的一致性.实验结果表明，采用此方案可以制备出尖端孔径小于100 nm且锥体角高达70°的光纤探针，且重复性高.此外，该方案的装置结构简单，实现容易.

英文摘要：

A design of automatism etching for fabricating the fiber probe of scanning near-field optical microscope is proposed.Probes of various structures,such as sharp tip and large cone angle or multi-taper,can be formed by using the special structure formed in the static etching process and the change of the contact position of meniscus on the fiber surface caused by the fiber′s movement in the dynamic etching process,and controlling the time of etching.The automatism of fabricating the probe is realized by controlling the whole equipment with the computer in this design,so that the experimental conditions of forming fiber probe are the same.The experimental results show that fiber probes with 70° cone angle can be fabricated,which is under 100nm.And,the fiber probes with high repeatability and different configuration can be obtained by using this design,so that different requirements can be satisfied.In addition,the configuration of the design is very simple and can be actualized easily.