电子背散射衍射(EBSD)技术是现代构造地质学与显微构造分析领域一项崭新的技术,它与现代高分辨率扫描电子显微镜和能谱分析设备结合.可以对块状样品中微米或纳米级尺度的颗粒进行晶体结构分析.从而使微观结构、微区成分与结晶学优选数据结合起来,能够更精细地对比研究矿物和岩石显微构造,为岩石显微构造分析开辟了一个全新的领域。分析了EBSD技术的基本原理、系统构成、样品制备和工作程序。介绍了石英组构测量,极细粒物质(微角砾岩)的组构特点,二轴晶矿物(角闪石)的组构、变形机制和金属硫化物组构分析的应用实例,对于应用EBSD系统开展研究存在的一些问题进行了讨论。
The electron backscattered diffraction (EBSD) technique is a brand-new technique of fabric artalysis in modern structural geology. Its combination with the high resolution scanning electron microscope and energy dispersion spectrometer provides the possibility to perform a crystallographic analysis of nficron- to nano-scale particles in massive samples and thus comprehensively use the nficrotextural, microchernical and crystallographic data to conduct a more intensive comparative study of the microstructures of minerals and rocks. The technique has opened up a new area of study for microstrnctural analysis. This paper introduces the basic principles and major constitution of the EBSD technique, procedures of working and sample processing, as well as quartz fabric measurements, fabric features of very fine material (microbreccia), fabrics and deformation mechanism of biaxial minerals (hornblende) and fabric anal- ysis of metal sulfide. The paper also discusses difficulties in data acquisition and processing in the application of the EBSD system.