中文摘要：

设计一种具有环形PN结的埋栅型（circle junction buried electrode，CJBE）硅基薄膜太阳电池及其制备工艺。研究表明：电池的光谱响应性能比传统单结电池提高约40％，电池性能随电池结构参数的变化而变化，随着电池厚度的增大，电池的长波响应增强，但短波响应微弱下降；电池通孔面积增大，电池的光谱响应强度减弱；电池N型杂质浓度增大，电池光谱响应强度先增强后减弱；电池P型杂质浓度增大，电池的光谱响应强度减弱。

英文摘要：

A circle junction amorphous silicon thin film solar cell with buried electrode （CJBE）and its fabrication process is designed. The spectral response of CJBE solar cell enhanced 40% compared with traditional single junction amorphous thin film solar cell. The long wave spectral response increase and the short wave spectral response decrease slightly with the solar cell thickness increasing. The spectral response decrease with increasing the area of via hde. The concentration of N impurities increasing leads the spectral response increasing first then decreasing. The concentration of P impurities will decrease the spectral response.