中文摘要：

Ta2O5薄膜具有很好的电学性能和光学性能，制备方法种类繁多，如溶胶一凝胶法（Sol—gel）、化学气相沉积法、电子柬蒸发技术、溅射法、Ta层阳极氧化或热氧化法、离子辅助沉积法（IBAD）、原子层沉积法（ALD）等。评述了现有各种制备方法的优缺点，综述了Ta2O5薄膜各种方法制备的条件、薄膜的功能性质等，并评析了金属有机化合物为前驱体制备性能优良的Ta2O5薄膜的前景。

英文摘要：

Ta2O5 films possess good electrics properties and optics properties. Currently, the preparation methods are classified as sol-gel,CVD, ALD and so on, the merits and demerits of those methods are discussed, the controlling conditions of these fabrication methods and the as-synthesized film＇s properties are summarized. Finally, the prospect of using the metal-organic compound as precursor to prepare excellent performance Ta20s films is also introduced.