中文摘要：

采用Comsol Multiphysics模拟软件研究了三种不同形状的坩埚（圆形、底部凹形及倒锥形）对多晶硅定向凝固过程中热场及流场的影响。结果显示：圆形和底部凹形坩埚内熔体的热场差异不大，而与这两种坩埚相比，倒锥形的坩埚可以得到更加均匀的热场分布及平直的固液界面；三种坩埚内熔体底部及侧壁区域的热对流变化基本相同，但熔体中心区域不同；圆形及底部凹形坩埚内中心区域的热对流较弱，而倒锥形坩埚内熔体中心区域的热对流较强，这在一定程度上有利于熔体内杂质的排出。

英文摘要：

The impacts of three crucibles with different shapes （circular, concave as well as inverted conical） on thermal field and flow field during directional solidification of polysilicon were studied by using Comsol Multiphysics software. The results show that the differences of the thermal field of melt inside the crucibles with round and bottom concave are not obvious. However, compared with the two kinds of crucible, inverted conical crucible can achieve more even thermal field distribution and flat solid fluid interface. Heat convection are basically the same in the regions of bottom and side wall of the melt inside three kinds of crucible, but it is not different in the central regions. Heat convection is feeble in the central regions of circular and concave crucibles, however, it is stronger in the inverted conical crucible, which is beneficial to the discharge of the melt inpurity to a certain extent.