中文摘要：

采用磁控溅射法在Si（100）基底上镀制了膜系结构分别为[Mg/Co]20、[Mg/SiC]20的两组多层膜,以研究Mg基多层膜的稳定性。对放置在室温和80%相对湿度环境下的样品进行显微镜、表面粗糙度和X射线掠入射反射率测试,对比研究了Mg/Co和Mg/SiC两种多层膜结构在相同环境中的损坏状况。对比结果显示：放置4天后,Mg/SiC损坏面积为26.34%,表面粗糙度为10nm;Mg/Co的损坏面积为2.78%,表面粗糙度为5nm。6天后,X射线掠入射反射率测量显示Mg/SiC多层膜一级反射峰完全消失,而Mg/Co多层膜的一级反射峰仍有47.63%的反射率。实验表明,Mg/Co多层膜的表面层和内部多层膜结构的损坏速度较Mg/SiC慢,具有较好的环境稳定性。另外,X射线光电子谱（XPS）测试Mg基多层膜损坏后的产物主要为MgCO3、Mg（OH）2和少量的MgO,且内层Mg（OH）2与MgCO3含量的比值显著高于表面层。分析认为,水汽是造成Mg基多层膜损坏的主要原因,今后Mg基多层膜保护层的研究可主要针对如何防止水汽进入膜层。

英文摘要：

To research the stability of Mg-based multilayers, two groups of multilayers, [Mg/Co]20 and [Mg/SiC]20 were coated on a Si（100） substrate by magnetron sputtering method. The two sam- ples were tested by a microscopy, a surface roughness experiment and an X-ray grazing incidence re- flectivity test at room temperature and a relative humidity of 80 %. The contract experiments on multi- layer damage for Mg/Co Mg/SiC were performed in the same condition. The results show that after being exposed in the atmospheric environment for 4 days, the damaged area and surface roughness of the Mg/SiC multilayer sample are up to 26.34~ and 10 nm, respectively, while those of the Mg/Co multilayer sample are 2.78~ and 5 nm, respectively. After 6 days, the 1st reflection peak of Mg/SiC sample is completely disappeared, and Mg/Co sample still has a peak of 47.63~ reflectivity. The ex- perimental results show that the Mg/Co multilayer sample has a better environmental stability as com- pared with the Mg/SiC multilayer. The X Photoelectron Spectroscopy （XPS） shows that the productions of the damaged Mg-based multilayers are mainly MgCO2, Mg（OH）2 and modest MgO. Moreo- ver, the content ratio of Mg （OH）2 and MgCO2 in the inner layer is significantly higher than that in the surface layer. Experimental results suggest that the reason for Mg-based multilayer damage is the erosion of H2O（g）, so the capping layer of Mg-based multilayer should prevent the H2O（g） penetrat- ing into the mulilayer.