中文摘要：

通过介电泳技术将敏感元件Sn02球形纳米颗粒定位到间距为20μm的Au叉指电极之间，制备了一种相对湿度传感器．从获得的I-V曲线可以看出，Au／Sn02／Sn02／Au组合结构具有良好的电导率．通过自己设计的相对湿度测试系统测试了其传感特性，结果显示该湿度传感器具有高的敏感性及可重复性．证明了运用介电泳方法所制备的湿度传感器在各种不同的湿度条件下，都具有很好的稳定性，即使是在非常高的湿度条件下．并且这种方法可以广泛用于其它种类的纳米球和各种不同器件结构中．

英文摘要：

A relative humidity sensor was fabricated by dielectrophoresis （DEP） to connect with the sphere-shaped SnO2 nano-particles as sensing elements based on the Au micro- electrodes with the gap of 20 μm. the I-V curve obtained verified, good electric conductivity of the Au/SnO2/SnO2/Au structure fabricated, The sensing properties were tested in a self-designed relative humidity measuring system. The high sensitivity and good repeata- bility were obtained. It was proved the sensing structure fabricated in the solution using DEP has good stability under varied humidity levels, even under a high humidity level, The proposed methodology can be easily applied to other nano-spheres and construction of other devices. Key words： dielectrophoresis; nano-sphere; tin oxide; micro-electrode; humidity sensor