中文摘要：

利用选区电子衍射法定量表征热解炭涂层的择优取向。采用扫描电镜观察热解炭涂层自然断面的结构形貌特征,并采用透射电镜测定取向角,通过在同一位置改变选区的面积得到不同的衍射图谱,讨论选区面积对取向角的影响。研究结果表明：热解炭涂层主要由球形颗粒状结构组成,颗粒直径为300～1000nm,片层状结构所占体积比很小;热解炭涂层在局部区域（直径为190nm的选区）内的平均取向角为72°,并且球形颗粒内芳香碳平面的择优取向方向平行于颗粒表面;球形颗粒状结构决定了涂层的取向角随着选区面积的增大而增大,而球形颗粒较高的体积比又将进一步导致热解炭涂层整体呈现各向同性。

英文摘要：

Preferred orientation of pyrocarbon coating was characterized quantificationally by selected area electron diffraction.Structural morphology of coating natural section was observed by scanning electron microscopy.Orientation angles were measured by transmission electron microscopy.The effect of selected area dimension on orientation angle was discussed through changing selected area dimension and obtaining different diffraction patterns at the same position. The results show that the coating is principally composed of spherical particles with diameter of 300-1 000 nm and the volume ratio of the laminar features is very low.The average orientation angle of pyrocarbon coating is 72°in a local area with 190 nm in diameter.The preferred orientation of the aromatic planes within spherical particles is parallel to the particle surface.The presence of spherical particles makes orientation angle increase with the increase of selected area dimension. Moreover,the higher volume ratio of these spherical particles results in the overall isotropy of the pyrocarbon coating.