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Material removal mechanism of ceria particles with different sizes in glass polishing
  • 期刊名称：OPTICAL ENGINEERING
  • 时间：2014
  • 页码：035104-
  • 相关项目：光刻物镜光学零件纳米精度制造基础研究
作者： 彭文强|关朝亮|李圣怡|
同期刊论文项目
光刻物镜光学零件纳米精度制造基础研究
期刊论文 46 会议论文 7 获奖 4 著作 1
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