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Correlation between sputtering parameters and composition of SmCo-based films for microelectromechan
  • ISSN号：0021-8979
  • 期刊名称：Journal of Applied Physics
  • 时间：0
  • 页码：1193-1196
  • 语言：英文
  • 相关项目：信息薄膜与LTCC集成器件
作者： Li, Yuanxun|Song, Yuanqiang|Yang, Qinghui|Shen, Jian|Zhang, Huaiwu|Peng, Long|
同期刊论文项目
信息薄膜与LTCC集成器件
期刊论文 200 会议论文 42 获奖 6 专利 81
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