采用起始原料无氟的工艺和含氟的Ba-TFA工艺制备YBa2Cu3O7-δ(YBCO)前驱体溶胶,在LAO(001)基板上制得YBCO凝胶膜,热处理后都可以获得表面光滑、无裂缝的YBCO薄膜。薄膜的性能利用X-射线衍射(XRD),扫描电镜(SEM)以及光电子谱(XPS)等手段进行测试,结果表明:无氟工艺制备的薄膜由于热处理过程中生成了BaCO3相而严重地影响到薄膜的超导性能,而Ba-TFA法所获得的薄膜则表现出了良好外延生长,临界转变温度Tc=89K,转变温度宽度△Tc〈1 K,临界电流密度Jc=2.8MA/cm2。
In this study, the epitaxial YBa2Cu3O7-δ (YBCO) superconductor thin films were prepared by two kinds of Ba - TFA and fluorine - free sol - gel method. The films obtained by two manners both are smooth and crack - free. YBCO - films are characterized by X - ray diffractometer ( XRD), scanning electron microscopy ( SEM ) and X - ray Photoelectron Spectroscopy (XPS). The results indicate that the as -prepared YBCO -films using the low -fluorine -content solution exhibit good textures and surface morphology. Samples of YBCO - films have good superconducting properties including high critical transition temper- ature Tc = 89K, sharp transition temperature△Tc 〈 1 K, and enhanced critical current density Jc = 2.8MA/cm^2. Keywords: YBCO, Sol-gel, Ba-TFA, Film