中文摘要：

透明进行 ZnO : 有好粘附，低抵抗力和高发射度的 AI 电影在 polyptopylene 己二酸盐(PPA ) 上被准备了， polyisocyanate (PI ) 和由 r.f 磁控管劈啪作响的聚酯底层。获得的电影的结构、电、光的性质被学习。多晶的 ZnO : 有象 5.76xl0 ^-4 Ω厘米一样低的抵抗力的 AI 电影，搬运人集中 9.06xl0 ^ 20 厘米 ^-3 和霍尔活动性 11.98 厘米 ^ 2 V ^-1s^-1 在 PPA 上被生产由控制免职参数的底层。PPA 上的电影的平均发射度是～ 8 0% 在可见光谱的波长范围。PPA 底层上的电影在其它种底层上与这些电影相比有更好电、光的性质。

英文摘要：

Transparent conducting ZnO:AI films with good adhesion, low resistivity and high transmittance have been prepared on polyptopylene adipate (PPA), polyisocyanate (PI) and polyester substrates by r.f. magnetron sputtering. The structural, electrical and optical properties of the obtained films were studied. The polycrystalline ZnO:AI films with resistivity as low as 5.76xl0^-4 Ω.cm, carrier concentration 9.06xl0^20 cm^-3 and Hall mobility 11.98 cm^2 V^-1s^-1 were produced on PPA substrate by controlling the deposition parameters. The average transmittance of films on PPA is ～80% in the wavelength range of visible spectrum. The films on PPA substrates have better electrical and optical properties compared with the films on other kinds of substrates.